Abstract: This letter introduces a micro-electromechanical system (MEMS) resonant pressure gauge based on aluminum nitride piezoelectric resonators that can operate in an atmospheric environment. The ...
Abstract: This paper presents micro-Pirani vacuum gauges using low-resistivity monocrystal silicon for the heaters and the heat sinks. We designed a new Pirani gauge with an embedded Wheatstone bridge ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results